Lihua Li

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Adhesion improvement for low k dielectrics
- Patent number 7,459,404
- Issue date Dec 2, 2008
- Applied Materials, Inc.
- Lihua Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming a low-K dual damascene interconnect structure
- Patent number 7,132,369
- Issue date Nov 7, 2006
- Applied Materials, Inc.
- Gerardo A. Delgadino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of improving stability in low k barrier layers
- Patent number 7,049,249
- Issue date May 23, 2006
- Applied Materials
- Lihua Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Adhesion improvement for low k dielectrics
- Patent number 7,030,041
- Issue date Apr 18, 2006
- Applied Materials Inc.
- Lihua Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hardness improvement of silicon carboxy films
- Patent number 6,936,309
- Issue date Aug 30, 2005
- Applied Materials, Inc.
- Lihua Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for curing low dielectric constant film using direct current...
- Patent number 6,914,014
- Issue date Jul 5, 2005
- Applied Materials, Inc.
- Lihua Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of reducing plasma-induced damage for advanced plasma CVD d...
- Patent number 6,911,403
- Issue date Jun 28, 2005
- Applied Materials, Inc.
- Lihua Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Use of cyclic siloxanes for hardness improvement of low k dielectri...
- Patent number 6,815,373
- Issue date Nov 9, 2004
- Applied Materials Inc.
- Vinita Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of improving stability in low k barrier layers
- Patent number 6,790,788
- Issue date Sep 14, 2004
- Applied Materials Inc.
- Lihua Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method of improving stability in low k barrier layers
- Publication number 20050042858
- Publication date Feb 24, 2005
- Lihua Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods of reducing plasma-induced damage for advanced plasma CVD d...
- Publication number 20050042885
- Publication date Feb 24, 2005
- APPLIED MATERIALS, INC.
- Lihua Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Use of cyclic siloxanes for hardness improvement
- Publication number 20040234688
- Publication date Nov 25, 2004
- Vinita Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus to improve cracking thresholds and mechanical...
- Publication number 20040137757
- Publication date Jul 15, 2004
- APPLIED MATERIALS, INC.
- Lihua Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF IMPROVING STABILITY IN LOW K BARRIER LAYERS
- Publication number 20040137756
- Publication date Jul 15, 2004
- APPLIED MATERIALS, INC.
- Lihua Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR CURING LOW DIELECTRIC CONSTANT FILM USING DIRECT CURRENT...
- Publication number 20040137758
- Publication date Jul 15, 2004
- Applied Materials,Inc
- Lihua Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for curing low dielectric constant film by electron beam
- Publication number 20040101632
- Publication date May 27, 2004
- APPLIED MATERIALS, INC.
- Wen H. Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Reacting an organosilicon compound with an oxidizing gas to form an...
- Publication number 20030211244
- Publication date Nov 13, 2003
- APPLIED MATERIALS, INC.
- Lihua Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Use of cyclic siloxanes for hardness improvement
- Publication number 20030194880
- Publication date Oct 16, 2003
- APPLIED MATERIALS, INC.
- Vinita Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Crosslink cyclo-siloxane compound with linear bridging group to for...
- Publication number 20030194495
- Publication date Oct 16, 2003
- APPLIED MATERIALS, INC.
- Lihua Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Hardness improvement of silicon carboxy films
- Publication number 20030186000
- Publication date Oct 2, 2003
- APPLIED MATERIALS, INC.
- Lihua Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Adhesion improvement for low k dielectrics

Method of forming a low-K dual damascene interconnect structure

Method of improving stability in low k barrier layers

Adhesion improvement for low k dielectrics

Hardness improvement of silicon carboxy films

Method for curing low dielectric constant film using direct current...

Methods of reducing plasma-induced damage for advanced plasma CVD d...

Use of cyclic siloxanes for hardness improvement of low k dielectri...

Method of improving stability in low k barrier layers

Patents Applicationslast 30 patents

Method of improving stability in low k barrier layers

Methods of reducing plasma-induced damage for advanced plasma CVD d...

Use of cyclic siloxanes for hardness improvement

Method and apparatus to improve cracking thresholds and mechanical...

METHOD OF IMPROVING STABILITY IN LOW K BARRIER LAYERS

METHOD FOR CURING LOW DIELECTRIC CONSTANT FILM USING DIRECT CURRENT...

Method for curing low dielectric constant film by electron beam

Reacting an organosilicon compound with an oxidizing gas to form an...

Use of cyclic siloxanes for hardness improvement

Crosslink cyclo-siloxane compound with linear bridging group to for...

Hardness improvement of silicon carboxy films