Lihui Wen

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Beijing, CN

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Patents Grantslast 30 patents

Information Patent Grant
Gas phase etching device and gas phase etching apparatus
- Patent number 11,107,706
- Issue date Aug 31, 2021
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Jun Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hot plate and substrate processing equipment using the same
- Patent number 10,287,686
- Issue date May 14, 2019
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Mengxin Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
GAS PHASE ETCHING DEVICE AND GAS PHASE ETCHING APPARATUS
- Publication number 20190228993
- Publication date Jul 25, 2019
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Jun ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPOUR CHAMBER AND SUBSTRATE PROCESSING EQUIPMENT USING SAME
- Publication number 20130269614
- Publication date Oct 17, 2013
- Beijing NMC Co., Ltd.
- Mengxin Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...