Lili Feng

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Self aligned multiple patterning
- Patent number 11,881,402
- Issue date Jan 23, 2024
- Applied Materials, Inc.
- Lili Feng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fully self-aligned subtractive etch
- Patent number 11,869,807
- Issue date Jan 9, 2024
- Applied Materials, Inc.
- Lili Feng
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SELF ALIGNED MULTIPLE PATTERNING
- Publication number 20220102144
- Publication date Mar 31, 2022
- Applied Materials, Inc.
- Lili FENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FULLY SELF-ALIGNED SUBTRACTIVE ETCH
- Publication number 20210391215
- Publication date Dec 16, 2021
- Applied Materials, Inc.
- Lili Feng
- H01 - BASIC ELECTRIC ELEMENTS