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Shanghai, CN
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Patents Grants
last 30 patents
Information
Patent Grant
Moving platform device, exposure device and lithography machine
Patent number
10,353,297
Issue date
Jul 16, 2019
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Lili Ge
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Silicon wafer edge protection device
Patent number
9,964,864
Issue date
May 8, 2018
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Xu Zhou
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
MOVING PLATFORM DEVICE, EXPOSURE DEVICE AND LITHOGRAPHY MACHINE
Publication number
20190025712
Publication date
Jan 24, 2019
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Lili GE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SILICON WAFER EDGE PROTECTION DEVICE
Publication number
20170357162
Publication date
Dec 14, 2017
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Xu ZHOU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY