Lili GE

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Shanghai, CN

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Patents Grantslast 30 patents

Information Patent Grant
Moving platform device, exposure device and lithography machine
- Patent number 10,353,297
- Issue date Jul 16, 2019
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Lili Ge
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Silicon wafer edge protection device
- Patent number 9,964,864
- Issue date May 8, 2018
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Xu Zhou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
MOVING PLATFORM DEVICE, EXPOSURE DEVICE AND LITHOGRAPHY MACHINE
- Publication number 20190025712
- Publication date Jan 24, 2019
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Lili GE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON WAFER EDGE PROTECTION DEVICE
- Publication number 20170357162
- Publication date Dec 14, 2017
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Xu ZHOU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY