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Lili Taherabadi
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Irvine, CA, US
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last 30 patents
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Patent Grant
Surface and composition enhancements to high aspect ratio C-MEMS
Patent number
7,534,470
Issue date
May 19, 2009
The Regents of the University of California
Marc J. Madou
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
Surface and composition enhancements to high aspect ratio C-MEMS
Publication number
20060068107
Publication date
Mar 30, 2006
The Regents of the University of California.
Marc J. Madou
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
High aspect ratio C-MEMS architecture
Publication number
20050255233
Publication date
Nov 17, 2005
The Regents of the University of California.
Marc J. Madou
H01 - BASIC ELECTRIC ELEMENTS