TREA

Lilin Chang

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  • Taipei, TW
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Patents Grantslast 30 patents

  • Information Patent Grant

    Lithography patterning technique
    • Patent number 11,774,855
    • Issue date Oct 3, 2023
    • Taiwan Semiconductor Manufacturing Company, Ltd
    • Lilin Chang
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Photoresist with gradient composition for improved uniformity
    • Patent number 11,112,698
    • Issue date Sep 7, 2021
    • Taiwan Semiconductor Manufacturing Co., Ltd
    • Chang Lilin
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Lithography patterning technique
    • Patent number 10,539,878
    • Issue date Jan 21, 2020
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Lilin Chang
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Lithography patterning technique
    • Patent number 9,645,497
    • Issue date May 9, 2017
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Lilin Chang
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents