Lin-Hung SHIU

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Hsinchu City, TW

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Patents Grantslast 30 patents

Information Patent Grant
Lithography method with surface modification layer
- Patent number 10,101,659
- Issue date Oct 16, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shu-Fang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hood for immersion lithography
- Patent number 7,675,604
- Issue date Mar 9, 2010
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Li-Jui Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure scan and step direction optimization
- Patent number 7,666,576
- Issue date Feb 23, 2010
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Fu-Jye Liang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Lithography Method with Surface Modification Layer
- Publication number 20180047561
- Publication date Feb 15, 2018
- Taiwan Semiconductor Manufacturing Co., LTD
- Shu-Fang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMMERSION LITHOGRAPHY DEFECT REDUCTION WITH TOP COATER REMOVAL
- Publication number 20080020324
- Publication date Jan 24, 2008
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Lin-Hung SHIU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE SCAN AND STEP DIRECTION OPTIMIZATION
- Publication number 20070285639
- Publication date Dec 13, 2007
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Fu-Jye LIANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HOOD FOR IMMERSION LITHOGRAPHY
- Publication number 20070258060
- Publication date Nov 8, 2007
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Li-Jui CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY