Lin Sha

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Tsukui-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Sheet type heat treating apparatus and method for processing semico...
- Patent number 7,029,505
- Issue date Apr 18, 2006
- Tokyo Electron Limited
- Lin Sha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Transfer apparatus and method for semiconductor process and semicon...
- Patent number 6,845,292
- Issue date Jan 18, 2005
- Tokyo Electron Limited
- Lin Sha
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Sheet type heat treating device and method for processing semicondu...
- Publication number 20050260835
- Publication date Nov 24, 2005
- Lin Sha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Transfer apparatus and method for semiconductor process and semicon...
- Publication number 20040158347
- Publication date Aug 12, 2004
- Lin Sha
- H01 - BASIC ELECTRIC ELEMENTS