Lin Xu

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Houston, TX, US

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Patents Grantslast 30 patents

Information Patent Grant
Hollow cathode device and method for using the device to control th...
- Patent number 9,455,133
- Issue date Sep 27, 2016
- Tokyo Electron Limited
- Kazuki Denpoh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hollow cathode device and method for using the device to control th...
- Patent number 8,409,459
- Issue date Apr 2, 2013
- Tokyo Electron Limited
- Kazuki Denpoh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion energy analyzer and methods of manufacturing and operating
- Patent number 7,875,859
- Issue date Jan 25, 2011
- Tokyo Electron Limited
- Lee Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Two-grid ion energy analyzer and methods of manufacturing and opera...
- Patent number 7,777,179
- Issue date Aug 17, 2010
- Tokyo Electron Limited
- Lee Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Suppressor of hollow cathode discharge in a shower head fluid distr...
- Patent number 7,744,720
- Issue date Jun 29, 2010
- Tokyo Electron Limited
- Lee Chen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
HOLLOW CATHODE DEVICE AND METHOD FOR USING THE DEVICE TO CONTROL TH...
- Publication number 20130228284
- Publication date Sep 5, 2013
- TOKYO ELECTRON LIMITED
- Kazuki DENPOH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION ENERGY ANALYZER AND METHODS OF MANUFACTURING AND OPERATING
- Publication number 20090242790
- Publication date Oct 1, 2009
- TOKYO ELECTRON LIMITED
- Lee Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Two-grid ion energy analyzer and methods of manufacturing and opera...
- Publication number 20090242791
- Publication date Oct 1, 2009
- TOKYO ELECTRON LIMITED
- Lee Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HOLLOW CATHODE DEVICE AND METHOD FOR USING THE DEVICE TO CONTROL TH...
- Publication number 20090218212
- Publication date Sep 3, 2009
- TOKYO ELECTRON LIMITED
- Kazuki Denpoh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Suppressor of hollow cathode discharge in a shower head fluid distr...
- Publication number 20090145553
- Publication date Jun 11, 2009
- TOKYO ELECTRON LIMITED
- Lee CHEN
- H01 - BASIC ELECTRIC ELEMENTS