Membership
Tour
Register
Log in
Lin Ye
Follow
Person
Vallejo, CA, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Integrated post-etch treatment for a dielectric etch process
Patent number
6,379,574
Issue date
Apr 30, 2002
Applied Materials, Inc.
Hui Ou-Yang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
High density plasma post-etch treatment for a dielectric etch process
Publication number
20020074312
Publication date
Jun 20, 2002
Eric Ou-Yang
H01 - BASIC ELECTRIC ELEMENTS