Lina Shi

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Beijing, CN

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Patents Grantslast 30 patents

Information Patent Grant
Defect detection system for extreme ultraviolet lithography mask
- Patent number 9,546,964
- Issue date Jan 17, 2017
- The Institute of Microelectronics of Chinese Academy of Sciences
- Hailiang Li
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Sub-wavelength extreme ultraviolet metal transmission grating and m...
- Patent number 9,442,230
- Issue date Sep 13, 2016
- Institute of Microelectronics, Chinese Academy of Sciences
- Hailiang Li
- G02 - OPTICS
Information Patent Grant
Projection-type photolithography system using composite photon sieve
- Patent number 8,736,812
- Issue date May 27, 2014
- Institute of Microelectronics, Chinese Academy of Sciences
- Changqing Xie
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR FABRICATING ANTI-REFLECTIVE LAYER ON QUARTZ SURFACE BY U...
- Publication number 20220317338
- Publication date Oct 6, 2022
- Institute of Microelectronics, Chinese Academy of Sciences
- Lina SHI
- G02 - OPTICS
Information Patent Application
DEFECT DETECTION SYSTEM FOR EXTREME ULTRAVIOLET LITHOGRAPHY MASK
- Publication number 20150104094
- Publication date Apr 16, 2015
- THE INSTITUTE OF MICROELECTRONICS OF CHINESE ACADEMY OF SCIENCES
- Hailiang Li
- G01 - MEASURING TESTING
Information Patent Application
SUB-WAVELENGTH EXTREME ULTRAVIOLET METAL TRANSMISSION GRATING AND M...
- Publication number 20140177039
- Publication date Jun 26, 2014
- Institute of Microelectronics, Chinese Academy of Sciences
- Hailiang Li
- G02 - OPTICS
Information Patent Application
PROJECTION-TYPE PHOTOLITHOGRAPHY SYSTEM USING COMPOSITE PHOTON SIEVE
- Publication number 20130044299
- Publication date Feb 21, 2013
- Institute of Microelectronics, Chinese Academy of Sciences
- Changqing Xie
- G02 - OPTICS