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Linda Braly
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Oakland, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma etch method to reduce micro-loading
Patent number
8,901,004
Issue date
Dec 2, 2014
Lam Research Corporation
Tom Kamp
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Profile and CD uniformity control by plasma oxidation treatment
Patent number
8,671,878
Issue date
Mar 18, 2014
Lam Research Corporation
Qinghua Zhong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Profile and CD uniformity control by plasma oxidation treatment
Patent number
8,298,949
Issue date
Oct 30, 2012
Lam Research Corporation
Qinghua Zhong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-step method for etching strain gate recesses
Patent number
7,303,999
Issue date
Dec 4, 2007
Lam Research Corporation
Saravanapriyan Sriraman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for planarization etch with in-situ monitoring by interferom...
Patent number
7,204,934
Issue date
Apr 17, 2007
Lam Research Corporation
Linda Braly
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for controlling and reducing profile variation in photoresi...
Patent number
7,018,780
Issue date
Mar 28, 2006
Lam Research Corporation
Vahid Vahedi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PROFILE AND CD UNIFORMITY CONTROL BY PLASMA OXIDATION TREATMENT
Publication number
20130025785
Publication date
Jan 31, 2013
LAM RESEARCH CORPORATION
Qinghua Zhong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCH METHOD TO REDUCE MICRO-LOADING
Publication number
20110021029
Publication date
Jan 27, 2011
Lam Research Corporation
Tom Kamp
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROFILE AND CD UNIFORMITY CONTROL BY PLASMA OXIDATION TREATMENT
Publication number
20100173496
Publication date
Jul 8, 2010
LAM RESEARCH CORPORATION
Qinghua Zhong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods for controlling and reducing profile variation in photoresi...
Publication number
20030148224
Publication date
Aug 7, 2003
LAM RESEARCH CORPORATION
Vahid Vahedi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY