Linda Fung-Ming Lee

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Phase change alloy etch
- Patent number 7,682,979
- Issue date Mar 23, 2010
- Lam Research Corporation
- Qian Fu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tungsten silicide etch process with reduced etch rate micro-loading
- Patent number 7,413,992
- Issue date Aug 19, 2008
- Lam Research Corporation
- Sok Kiow Tan
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Phase change alloy etch
- Publication number 20090130855
- Publication date May 21, 2009
- Lam Research Corporation
- Qian Fu
- H01 - BASIC ELECTRIC ELEMENTS