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Linda Fung-Ming Lee
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Fremont, CA, US
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last 30 patents
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Patent Grant
Phase change alloy etch
Patent number
7,682,979
Issue date
Mar 23, 2010
Lam Research Corporation
Qian Fu
H01 - BASIC ELECTRIC ELEMENTS
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Tungsten silicide etch process with reduced etch rate micro-loading
Patent number
7,413,992
Issue date
Aug 19, 2008
Lam Research Corporation
Sok Kiow Tan
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Phase change alloy etch
Publication number
20090130855
Publication date
May 21, 2009
Lam Research Corporation
Qian Fu
H01 - BASIC ELECTRIC ELEMENTS