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Linda N. Marquez
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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing chamber including multiple gas injection point...
Patent number
10,825,659
Issue date
Nov 3, 2020
Lam Research Corporation
Jason Lee Treadwell
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for achieving ultra-high selectivity while etching silicon n...
Patent number
9,911,620
Issue date
Mar 6, 2018
Lam Research Corporation
Helen H. Zhu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Contact clean in high-aspect ratio structures
Patent number
9,558,928
Issue date
Jan 31, 2017
Lam Research Corporation
Bayu Thedjoisworo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for forming microlenses
Patent number
8,801,947
Issue date
Aug 12, 2014
Mattson Technology, Inc.
Tinghao Frank Wang
G02 - OPTICS
Information
Patent Grant
Method and apparatus for self-aligned MOS patterning
Patent number
7,153,780
Issue date
Dec 26, 2006
Intel Corporation
Ervin T. Hill
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High aspect ratio sub-micron contact etch process in an inductively...
Patent number
6,228,774
Issue date
May 8, 2001
Lam Research Corporation
Linda N. Marquez
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Self-aligned contacts for semiconductor device
Patent number
6,165,910
Issue date
Dec 26, 2000
Lam Research Corporation
Janet M. Flanner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Self-aligned contacts for semiconductor device
Patent number
6,133,153
Issue date
Oct 17, 2000
Lam Research Corporation
Linda N. Marquez
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for etching self-aligned contacts
Patent number
5,783,496
Issue date
Jul 21, 1998
Lam Research Corporation
Janet M. Flanner
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
APPARATUS FOR ACHIEVING ULTRA-HIGH SELECTIVITY WHILE ETCHING SILICO...
Publication number
20180158692
Publication date
Jun 7, 2018
LAM RESEARCH CORPORATION
Helen H. Zhu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING CHAMBER INCLUDING MULTIPLE GAS INJECTION POINT...
Publication number
20170200586
Publication date
Jul 13, 2017
LAM RESEARCH CORPORATION
Jason Lee Treadwell
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR ACHIEVING ULTRA-HIGH SELECTIVITY WHILE ETCHING SILICON N...
Publication number
20160247688
Publication date
Aug 25, 2016
LAM RESEARCH CORPORATION
Helen H. Zhu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELECTIVE NITRIDE ETCH
Publication number
20160181116
Publication date
Jun 23, 2016
LAM RESEARCH CORPORATION
Ivan L. Berry
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
CONTACT CLEAN IN HIGH-ASPECT RATIO STRUCTURES
Publication number
20160064212
Publication date
Mar 3, 2016
LAM RESEARCH CORPORATION
Bayu Thedjoisworo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods for Forming Microlenses
Publication number
20130323933
Publication date
Dec 5, 2013
Tinghao Frank Wang
G02 - OPTICS
Information
Patent Application
Method and apparatus for self-aligned MOS patterning
Publication number
20050215039
Publication date
Sep 29, 2005
Ervin T. Hill
H01 - BASIC ELECTRIC ELEMENTS