Ling Huang

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Shanghai, CN

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Patents Grantslast 30 patents

Information Patent Grant
Large-field unit-magnification projection optical system
- Patent number 7,746,571
- Issue date Jun 29, 2010
- Shanghai Micro Electronics Equipment Co., Ltd.
- Tiejun Li
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
LARGE FIELD PROJECTION OBJECTIVE FOR LITHOGRAPHY
- Publication number 20130293859
- Publication date Nov 7, 2013
- SHANGHAI MICRO ELECTRONICS EQUIPMENT Co., LTD.
- Heng Wu
- G02 - OPTICS
Information Patent Application
LARGE-FIELD UNIT-MAGNIFICATION PROJECTION OPTICAL SYSTEM
- Publication number 20090185290
- Publication date Jul 23, 2009
- SHANGHAI MICRO ELECTRONICS EQUIPMENT Co., LTD.
- Tiejun Li
- G02 - OPTICS