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last 30 patents
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Patent Grant
Super-resolution imaging photolithography
Patent number
9,958,784
Issue date
May 1, 2018
THE INSTITUTE OF OPTICS AND ELECTRONICS, CHINESE ACADEMY OF SCIENCES
Xiangang Luo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
NEGATIVE REFRACTION IMAGING LITHOGRAPHIC METHOD AND EQUIPMENT
Publication number
20210200079
Publication date
Jul 1, 2021
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang LUO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUPER-RESOLUTION IMAGING PHOTOLITHOGRAPHY
Publication number
20160259253
Publication date
Sep 8, 2016
Institute of Optics and Electronics, Chinese Academy of Sciences
Xiangang LUO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY