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Patents Grants
last 30 patents
Information
Patent Grant
Integrated super-resolution laser direct-writing device and direct-...
Patent number
11,726,407
Issue date
Aug 15, 2023
Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
Aijun Zeng
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithography illumination system
Patent number
9,400,433
Issue date
Jul 26, 2016
Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
Aijun Zeng
G02 - OPTICS
Information
Patent Grant
Device and method for measuring phase retardation distribution and...
Patent number
9,297,744
Issue date
Mar 29, 2016
Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
Aijun Zeng
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
INTEGRATED SUPER-RESOLUTION LASER DIRECT-WRITING DEVICE AND DIRECT-...
Publication number
20220091512
Publication date
Mar 24, 2022
Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences
Aijun ZENG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHY ILLUMINATION SYSTEM
Publication number
20150286144
Publication date
Oct 8, 2015
Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences
Aijun ZENG
G02 - OPTICS
Information
Patent Application
DEVICE AND METHOD FOR MEASURING PHASE RETARDATION DISTRIBUTION AND...
Publication number
20140347665
Publication date
Nov 27, 2014
Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences
Aijun ZENG
G01 - MEASURING TESTING