Lingling PU

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
System and method for defect inspection using voltage contrast in a...
- Patent number 12,191,112
- Issue date Jan 7, 2025
- ASML Netherlands B.V.
- Wei Fang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cross-talk cancellation in multiple charged-particle beam inspection
- Patent number 12,080,513
- Issue date Sep 3, 2024
- ASML Netherlands B.V.
- Wei Fang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
In-die metrology methods and systems for process control
- Patent number 12,040,187
- Issue date Jul 16, 2024
- ASML Netherlands B.V.
- Lingling Pu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for adaptive alignment
- Patent number 11,842,420
- Issue date Dec 12, 2023
- ASML Netherlands B.V.
- Wei Fang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Fully automated SEM sampling system for e-beam image enhancement
- Patent number 11,769,317
- Issue date Sep 26, 2023
- ASML Netherlands B.V.
- Wentian Zhou
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Systems and methods of optimal metrology guidance
- Patent number 11,756,187
- Issue date Sep 12, 2023
- ASML Netherlands B.V.
- Lingling Pu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Image enhancement for multi-layered structure in charged-particle b...
- Patent number 11,694,312
- Issue date Jul 4, 2023
- ASML Netherlands B.V.
- Wei Fang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
In-die metrology methods and systems for process control
- Patent number 11,527,405
- Issue date Dec 13, 2022
- ASML Netherlands B.V.
- Lingling Pu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for adaptive alignment
- Patent number 11,308,635
- Issue date Apr 19, 2022
- ASML Netherlands B.V.
- Wei Fang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Systems and methods of optimal metrology guidance
- Patent number 11,216,938
- Issue date Jan 4, 2022
- ASML Netherlands B.V.
- Lingling Pu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for determining corrections to features of a mask
- Patent number 11,126,089
- Issue date Sep 21, 2021
- ASML Netherlands B.V.
- Wei Fang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND SYSTEM OF IMAGE ANALYSIS AND CRITICAL DIMENSION MATCHING...
- Publication number 20250003899
- Publication date Jan 2, 2025
- ASML NETHERLANDS B.V.
- Tim HOUBEN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEMS AND METHODS FOR DEFECT DETECTION AND DEFECT LOCATION IDENTI...
- Publication number 20250005739
- Publication date Jan 2, 2025
- ASML NETHERLANDS B.V.
- Shengcheng JIN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CROSS-TALK CANCELLATION IN MULTIPLE CHARGED-PARTICLE BEAM INSPECTION
- Publication number 20250006456
- Publication date Jan 2, 2025
- ASML NETHERLANDS B.V.
- Wei FANG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND SYSTEM FOR ANOMALY-BASED DEFECT INSPECTION
- Publication number 20240331132
- Publication date Oct 3, 2024
- ASML NETHERLANDS B.V.
- Haoyi LIANG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IMAGE DISTORTION CORRECTION IN CHARGED PARTICLE INSPECTION
- Publication number 20240331115
- Publication date Oct 3, 2024
- ASML NETHERLANDS B.V.
- Haoyi LIANG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MACHINE LEARNING-BASED SYSTEMS AND METHODS FOR GENERATING SYNTHETIC...
- Publication number 20240062362
- Publication date Feb 22, 2024
- ASML NETHERLANDS B.V.
- Zhe WANG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
FULLY AUTOMATED SEM SAMPLING SYSTEM FOR E-BEAM IMAGE ENHANCEMENT
- Publication number 20240046620
- Publication date Feb 8, 2024
- ASML NETHERLANDS B.V.
- Wentian ZHOU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CONTOUR EXTRACTION METHOD FROM INSPECTION IMAGE IN MULTIPLE CHARGED...
- Publication number 20230117237
- Publication date Apr 20, 2023
- ASML NETHERLANDS B.V.
- Lingling PU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IN-DIE METROLOGY METHODS AND SYSTEMS FOR PROCESS CONTROL
- Publication number 20230076943
- Publication date Mar 9, 2023
- ASML NETHERLANDS B.V.
- Lingling PU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEM AND METHOD FOR DEFECT INSPECTION USING VOLTAGE CONTRAST IN A...
- Publication number 20230012946
- Publication date Jan 19, 2023
- ASML NETHERLANDS B.V.
- Wei FANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MACHINE LEARNING BASED IMAGE GENERATION FOR MODEL BASE ALIGNMENTS
- Publication number 20220404712
- Publication date Dec 22, 2022
- ASML NETHERLANDS B.V.
- Qiang ZHANG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SELF-REFERENCING HEALTH MONITORING SYSTEM FOR MULTI-BEAM SEM TOOLS
- Publication number 20220319805
- Publication date Oct 6, 2022
- ASML NETHERLANDS B.V.
- Wei FANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CROSS-TALK CANCELLATION IN MULTIPLE CHARGED-PARTICLE BEAM INSPECTION
- Publication number 20220301811
- Publication date Sep 22, 2022
- ASML NETHERLANDS B.V.
- Wei FANG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR ADAPTIVE ALIGNMENT
- Publication number 20220245840
- Publication date Aug 4, 2022
- ASML NETHERLANDS B.V.
- Wei FANG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEMS AND METHODS OF OPTIMAL METROLOGY GUIDANCE
- Publication number 20220237759
- Publication date Jul 28, 2022
- ASML NETHERLANDS B.V.
- Lingling PU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEMS AND METHODS FOR FOCUSING CHARGED -PARTICLE BEAMS
- Publication number 20220068590
- Publication date Mar 3, 2022
- ASML NETHERLANDS B.V.
- Ying LUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMAGE ENHANCEMENT FOR MULTI-LAYERED STRUCTURE IN CHARGED-PARTICLE B...
- Publication number 20210350507
- Publication date Nov 11, 2021
- ASML NETHERLANDS B.V.
- Wei FANG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR DETERMINING CORRECTIONS TO FEATURES OF A MASK
- Publication number 20200326632
- Publication date Oct 15, 2020
- ASML NETHERLANDS B.V.
- Wei Fang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IN-DIE METROLOGY METHODS AND SYSTEMS FOR PROCESS CONTROL
- Publication number 20200211845
- Publication date Jul 2, 2020
- ASML NETHERLANDS B.V.
- Lingling PU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FULLY AUTOMATED SEM SAMPLING SYSTEM FOR E-BEAM IMAGE ENHANCEMENT
- Publication number 20200211178
- Publication date Jul 2, 2020
- ASML NETHERLANDS B.V.
- Wentian ZHOU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR ADAPTIVE ALIGNMENT
- Publication number 20200126242
- Publication date Apr 23, 2020
- ASML NETHERLANDS B.V.
- Wei FANG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEMS AND METHODS OF OPTIMAL METROLOGY GUIDANCE
- Publication number 20200074610
- Publication date Mar 5, 2020
- ASML Netherlands B.V.
- Lingling PU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEM IMAGE ENHANCEMENT METHODS AND SYSTEMS
- Publication number 20200018944
- Publication date Jan 16, 2020
- ASML Netherlands B.V.
- Wei FANG
- G02 - OPTICS

Lingling PU

Person

Patents Grantslast 30 patents

System and method for defect inspection using voltage contrast in a...

Cross-talk cancellation in multiple charged-particle beam inspection

In-die metrology methods and systems for process control

Method and apparatus for adaptive alignment

Fully automated SEM sampling system for e-beam image enhancement

Systems and methods of optimal metrology guidance

Image enhancement for multi-layered structure in charged-particle b...

In-die metrology methods and systems for process control

Method and apparatus for adaptive alignment

Systems and methods of optimal metrology guidance

Method for determining corrections to features of a mask

Patents Applicationslast 30 patents

METHOD AND SYSTEM OF IMAGE ANALYSIS AND CRITICAL DIMENSION MATCHING...

SYSTEMS AND METHODS FOR DEFECT DETECTION AND DEFECT LOCATION IDENTI...

CROSS-TALK CANCELLATION IN MULTIPLE CHARGED-PARTICLE BEAM INSPECTION

METHOD AND SYSTEM FOR ANOMALY-BASED DEFECT INSPECTION

IMAGE DISTORTION CORRECTION IN CHARGED PARTICLE INSPECTION

MACHINE LEARNING-BASED SYSTEMS AND METHODS FOR GENERATING SYNTHETIC...

FULLY AUTOMATED SEM SAMPLING SYSTEM FOR E-BEAM IMAGE ENHANCEMENT

CONTOUR EXTRACTION METHOD FROM INSPECTION IMAGE IN MULTIPLE CHARGED...

IN-DIE METROLOGY METHODS AND SYSTEMS FOR PROCESS CONTROL

SYSTEM AND METHOD FOR DEFECT INSPECTION USING VOLTAGE CONTRAST IN A...

MACHINE LEARNING BASED IMAGE GENERATION FOR MODEL BASE ALIGNMENTS

SELF-REFERENCING HEALTH MONITORING SYSTEM FOR MULTI-BEAM SEM TOOLS

CROSS-TALK CANCELLATION IN MULTIPLE CHARGED-PARTICLE BEAM INSPECTION

METHOD AND APPARATUS FOR ADAPTIVE ALIGNMENT

SYSTEMS AND METHODS OF OPTIMAL METROLOGY GUIDANCE

SYSTEMS AND METHODS FOR FOCUSING CHARGED -PARTICLE BEAMS

IMAGE ENHANCEMENT FOR MULTI-LAYERED STRUCTURE IN CHARGED-PARTICLE B...

METHOD FOR DETERMINING CORRECTIONS TO FEATURES OF A MASK

IN-DIE METROLOGY METHODS AND SYSTEMS FOR PROCESS CONTROL

FULLY AUTOMATED SEM SAMPLING SYSTEM FOR E-BEAM IMAGE ENHANCEMENT

METHOD AND APPARATUS FOR ADAPTIVE ALIGNMENT

SYSTEMS AND METHODS OF OPTIMAL METROLOGY GUIDANCE

SEM IMAGE ENHANCEMENT METHODS AND SYSTEMS