Lingxin JIANG

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for transferring substrate and method for transferring su...
- Patent number 12,362,215
- Issue date Jul 15, 2025
- Tokyo Electron Limited
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Transfer Module, and Substrate Transfer Method in Semiconductor Man...
- Publication number 20250174476
- Publication date May 29, 2025
- TOKYO ELECTRON LIMITED
- Dongwei LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Transfer Device and Power Supply Method for Substrate Tra...
- Publication number 20250112072
- Publication date Apr 3, 2025
- TOKYO ELECTRON LIMITED
- Lingxin JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TRANSFERRING SUBSTRATE AND METHOD FOR TRANSFERRING SU...
- Publication number 20230170239
- Publication date Jun 1, 2023
- TOKYO ELECTRON LIMITED
- Takehiro SHINDO
- H01 - BASIC ELECTRIC ELEMENTS