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Linh H. Thanh
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Cupertino, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Methods for contact clean
Patent number
8,642,473
Issue date
Feb 4, 2014
Applied Materials, Inc.
Mei Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ammonia-based plasma treatment for metal fill in narrow features
Patent number
8,551,880
Issue date
Oct 8, 2013
Applied Materials, Inc.
Bencherki Mebarki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming silicon containing layers on a substrate
Patent number
6,656,840
Issue date
Dec 2, 2003
Applied Materials Inc.
Nagarajan Rajagopalan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
METHODS FOR CONTACT CLEAN
Publication number
20120225558
Publication date
Sep 6, 2012
Applied Materials, Inc.
MEI CHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
AMMONIA-BASED PLASMA TREATMENT FOR METAL FILL IN NARROW FEATURES
Publication number
20090117736
Publication date
May 7, 2009
APPLIED MATERIALS, INC.
Bencherki Mebarki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING SILICON CONTAINING LAYERS ON A SUBSTRATE
Publication number
20030203614
Publication date
Oct 30, 2003
Applied Materials, Inc.
Nagarajan Rajagopalan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...