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Liping Zhang
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Leuven, BE
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Patents Grants
last 30 patents
Information
Patent Grant
Isolated semiconductor layer stacks for a semiconductor device
Patent number
11,545,401
Issue date
Jan 3, 2023
Imec VZW
Boon Teik Chan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of etching porous film
Patent number
10,236,162
Issue date
Mar 19, 2019
Tokyo Electron Limited
Shigeru Tahara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for producing an integrated circuit including a metallizatio...
Patent number
9,941,151
Issue date
Apr 10, 2018
Imec VZW
Liping Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of etching porous film
Patent number
9,859,102
Issue date
Jan 2, 2018
Tokyo Electron Limited
Shigeru Tahara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etching of porous substrates
Patent number
9,595,422
Issue date
Mar 14, 2017
Imec VZW
Mikhaïl Baklanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for microwave treatment of dielectric films
Patent number
9,414,445
Issue date
Aug 9, 2016
Applied Materials, Inc.
Iftikhar Ahmad
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
ISOLATED SEMICONDUCTOR LAYER STACKS FOR A SEMICONDUCTOR DEVICE
Publication number
20210175130
Publication date
Jun 10, 2021
IMEC vzw
Boon Teik Chan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF ETCHING POROUS FILM
Publication number
20180082823
Publication date
Mar 22, 2018
TOKYO ELECTRON LIMITED
Shigeru TAHARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR PRODUCING AN INTEGRATED CIRCUIT INCLUDING A METALLIZATIO...
Publication number
20170301583
Publication date
Oct 19, 2017
IMEC vzw
Liping Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF ETCHING POROUS FILM
Publication number
20160307732
Publication date
Oct 20, 2016
TOKYO ELECTRON LIMITED
Shigeru TAHARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING OF POROUS SUBSTRATES
Publication number
20160276133
Publication date
Sep 22, 2016
IMEC vzw
Mikhaïl Baklanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for microwave treatment of dielectric films
Publication number
20140322921
Publication date
Oct 30, 2014
Iftikhar Ahmad
H01 - BASIC ELECTRIC ELEMENTS