Liqun CHEN

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Patents Grantslast 30 patents

Information Patent Grant
Illumination system for lithographic projection exposure step-and-s...
- Patent number 9,709,896
- Issue date Jul 18, 2017
- Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
- Aijun Zeng
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
ILLUMINATION SYSTEM FOR LITHOGRAPHIC PROJECTION EXPOSURE STEP-AND-S...
- Publication number 20160109808
- Publication date Apr 21, 2016
- Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences
- Aijun ZENG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY