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Lirong Zhu
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Shanghai, CN
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Patents Grants
last 30 patents
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Patent Grant
Projection objective lens system
Patent number
8,970,964
Issue date
Mar 3, 2015
Shanghai Micro Electronics Equipment Co., Ltd.
Lirong Zhu
G02 - OPTICS
Patents Applications
last 30 patents
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Patent Application
PROJECTION OBJECTIVE LENS SYSTEM
Publication number
20130250434
Publication date
Sep 26, 2013
SHANGHAI MICRO ELECTRONICS EQUIPMENT Co., LTD.
Lirong Zhu
G02 - OPTICS