Lisa J. Enman

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods for selective dry etching gallium oxide
- Patent number 11,942,330
- Issue date Mar 26, 2024
- Applied Materials, Inc.
- Feng Q. Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Corrosion resistant film on a chamber component and methods of depo...
- Patent number 11,932,938
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Lisa J. Enman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silyl pseudohalides for silicon containing films
- Patent number 11,932,940
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Keenan N. Woods
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multilayer encapsulation stacks by atomic layer deposition
- Patent number 11,732,356
- Issue date Aug 22, 2023
- Applied Materials, Inc.
- Cong Trinh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Capacitive sensor for chamber condition monitoring
- Patent number 11,581,206
- Issue date Feb 14, 2023
- Applied Materials, Inc.
- Yaoling Pan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for selective dry etching gallium oxide
- Patent number 11,398,388
- Issue date Jul 26, 2022
- Applied Materials, Inc.
- Feng Q. Liu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS FOR TITANIUM-CONTAINING FILM REMOVAL
- Publication number 20240258116
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Baiwei Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER DEPOSITION OF RUTHENIUM OXIDE COATINGS
- Publication number 20240247370
- Publication date Jul 25, 2024
- Applied Materials, Inc.
- Jeffrey W. Anthis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CORROSION RESISTANT FILM ON A CHAMBER COMPONENT AND METHODS OF DEPO...
- Publication number 20240003003
- Publication date Jan 4, 2024
- Applied Materials, Inc.
- Lisa J. Enman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE ETCH OF A SUBSTRATE
- Publication number 20230420259
- Publication date Dec 28, 2023
- Applied Materials, Inc.
- David Thompson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Atomic Layer Deposition Of Metal Fluoride Films
- Publication number 20220351960
- Publication date Nov 3, 2022
- Applied Materials, Inc.
- Lisa J. Enman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR SELECTIVE DRY ETCHING GALLIUM OXIDE
- Publication number 20220301883
- Publication date Sep 22, 2022
- Applied Materials, Inc.
- Feng Q. Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR SELECTIVE DRY ETCHING GALLIUM OXIDE
- Publication number 20220076960
- Publication date Mar 10, 2022
- Applied Materials, Inc.
- Feng Q. Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CAPACITIVE SENSOR FOR CHAMBER CONDITION MONITORING
- Publication number 20210280443
- Publication date Sep 9, 2021
- Applied Materials, Inc.
- Yaoling Pan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Silyl Pseudohalides For Silicon Containing Films
- Publication number 20210140046
- Publication date May 13, 2021
- Applied Materials, Inc.
- Keenan N. Woods
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
MULTILAYER ENCAPSULATION STACKS BY ATOMIC LAYER DEPOSITION
- Publication number 20210032749
- Publication date Feb 4, 2021
- Applied Materials, Inc.
- Cong Trinh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CORROSION RESISTANT FILM ON A CHAMBER COMPONENT AND METHODS OF DEPO...
- Publication number 20210032745
- Publication date Feb 4, 2021
- Applied Materials, Inc.
- Lisa J. Enman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Lisa J. Enman

Person

Patents Grantslast 30 patents

Methods for selective dry etching gallium oxide

Corrosion resistant film on a chamber component and methods of depo...

Silyl pseudohalides for silicon containing films

Multilayer encapsulation stacks by atomic layer deposition

Capacitive sensor for chamber condition monitoring

Methods for selective dry etching gallium oxide

Patents Applicationslast 30 patents

SYSTEMS AND METHODS FOR TITANIUM-CONTAINING FILM REMOVAL

ATOMIC LAYER DEPOSITION OF RUTHENIUM OXIDE COATINGS

CORROSION RESISTANT FILM ON A CHAMBER COMPONENT AND METHODS OF DEPO...

SELECTIVE ETCH OF A SUBSTRATE

Atomic Layer Deposition Of Metal Fluoride Films

METHODS FOR SELECTIVE DRY ETCHING GALLIUM OXIDE

METHODS FOR SELECTIVE DRY ETCHING GALLIUM OXIDE

CAPACITIVE SENSOR FOR CHAMBER CONDITION MONITORING

Silyl Pseudohalides For Silicon Containing Films

MULTILAYER ENCAPSULATION STACKS BY ATOMIC LAYER DEPOSITION

CORROSION RESISTANT FILM ON A CHAMBER COMPONENT AND METHODS OF DEPO...