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Lisa P. Allen
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Beverly, MA, US
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last 30 patents
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Patent Grant
System and method for improving thin films by gas cluster ion beam...
Patent number
6,537,606
Issue date
Mar 25, 2003
Epion Corporation
Lisa P. Allen
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
System and method for improving thin films by gas cluster ion beam...
Publication number
20020014407
Publication date
Feb 7, 2002
Lisa P. Allen
H01 - BASIC ELECTRIC ELEMENTS