Lisheng Gao

Person

Saratoga, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Wafer inspection using difference images
- Patent number 11,270,430
- Issue date Mar 8, 2022
- KLA-Tencor Corporation
- Abdurrahman Sezginer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and system for correlating optical images with scanning elec...
- Patent number 11,244,442
- Issue date Feb 8, 2022
- KLA Corporation
- Hucheng Lee
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Repeater defect detection
- Patent number 11,204,332
- Issue date Dec 21, 2021
- KLA-Tencor Corporation
- Eugene Shifrin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Repeater defect detection
- Patent number 10,648,925
- Issue date May 12, 2020
- KLA-Tencor Corporation
- Eugene Shifrin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Generating high resolution images from low resolution images for se...
- Patent number 10,648,924
- Issue date May 12, 2020
- KLA-Tencor Corp.
- Jing Zhang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Systems and methods for detecting defects on a wafer
- Patent number 10,605,744
- Issue date Mar 31, 2020
- KLA-Tencor Corp.
- Lu Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nuisance reduction using location-based attributes
- Patent number 10,600,177
- Issue date Mar 24, 2020
- KLA-Tencor Corporation
- Bjorn Brauer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Dynamic care areas for defect detection
- Patent number 10,600,175
- Issue date Mar 24, 2020
- KLA-Tencor Corporation
- Bjorn Brauer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Visual feedback for inspection algorithms and filters
- Patent number 10,599,944
- Issue date Mar 24, 2020
- KLA-Tencor Corporation
- Hucheng Lee
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Automatic recipe stability monitoring and reporting
- Patent number 10,514,685
- Issue date Dec 24, 2019
- KLA-Tencor Corp.
- Hucheng Lee
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and system for correlating optical images with scanning elec...
- Patent number 10,410,338
- Issue date Sep 10, 2019
- KLA-Tencor Corporation
- Hucheng Lee
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Intra-die defect detection
- Patent number 10,393,671
- Issue date Aug 27, 2019
- KLA-Tencor Corp.
- Govindarajan Thattaisundaram
- G01 - MEASURING TESTING
Information Patent Grant
Adaptive local threshold and color filtering
- Patent number 10,395,359
- Issue date Aug 27, 2019
- KLA-Tencor Corp.
- Junqing Huang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
High sensitivity repeater defect detection
- Patent number 10,395,358
- Issue date Aug 27, 2019
- KLA-Tencor Corp.
- Bjorn Brauer
- G01 - MEASURING TESTING
Information Patent Grant
System and method for defining care areas in repeating structures o...
- Patent number 10,339,262
- Issue date Jul 2, 2019
- KLA-Tencor Corporation
- Junqing Huang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and systems for monitoring a non-defect related characteris...
- Patent number 10,324,046
- Issue date Jun 18, 2019
- KLA-Tencor Corp.
- Tao-Yi Fu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image based specimen process control
- Patent number 10,181,185
- Issue date Jan 15, 2019
- KLA-Tencor Corp.
- Allen Park
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus and methods for finding a best aperture and mode to enhan...
- Patent number 10,132,760
- Issue date Nov 20, 2018
- KLA-Tencor Corporation
- Pavel Kolchin
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Defect detection and classification based on attributes determined...
- Patent number 10,127,652
- Issue date Nov 13, 2018
- KLA-Tencor Corp.
- Lisheng Gao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Optical die to database inspection
- Patent number 10,012,599
- Issue date Jul 3, 2018
- KLA-Tencor Corp.
- Keith Wells
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Sub-pixel alignment of inspection to design
- Patent number 9,996,942
- Issue date Jun 12, 2018
- KLA-Tencor Corp.
- Santosh Bhattacharyya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Optical die to database inspection
- Patent number 9,915,625
- Issue date Mar 13, 2018
- KLA-Tencor Corp.
- Lisheng Gao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Systems and methods for detecting defects on a wafer
- Patent number 9,880,107
- Issue date Jan 30, 2018
- KLA-Tencor Corp.
- Lu Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detecting defects on a wafer using defect-specific and multi-channe...
- Patent number 9,846,930
- Issue date Dec 19, 2017
- KLA-Tencor Corp.
- Kenong Wu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Alignment of inspection to design using built in targets
- Patent number 9,830,421
- Issue date Nov 28, 2017
- KLA-Tencor Corp.
- Santosh Bhattacharyya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Defect detection using structural information
- Patent number 9,727,047
- Issue date Aug 8, 2017
- KLA-Tencor Corp.
- Qing Luo
- G05 - CONTROLLING REGULATING
Information Patent Grant
Apparatus and methods for finding a best aperture and mode to enhan...
- Patent number 9,726,617
- Issue date Aug 8, 2017
- KLA-Tencor Corporation
- Pavel Kolchin
- G01 - MEASURING TESTING
Information Patent Grant
Detecting defects on a wafer using defect-specific information
- Patent number 9,721,337
- Issue date Aug 1, 2017
- KLA-Tencor Corp.
- Kenong Wu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Context-based inspection for dark field inspection
- Patent number 9,715,725
- Issue date Jul 25, 2017
- KLA-Tencor Corp.
- Yong Zhang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Adaptive local threshold and color filtering
- Patent number 9,704,234
- Issue date Jul 11, 2017
- KLA-Tencor Corp.
- Junqing Huang
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
Repeater Defect Detection
- Publication number 20200240928
- Publication date Jul 30, 2020
- KLA-Tencor Corporation
- Eugene Shifrin
- G01 - MEASURING TESTING
Information Patent Application
Method and System for Correlating Optical Images with Scanning Elec...
- Publication number 20190333206
- Publication date Oct 31, 2019
- KLA-Tencor Corporation
- Hucheng Lee
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PREVIOUS LAYER NUISANCE REDUCTION THROUGH OBLIQUE ILLUMINATION
- Publication number 20190279357
- Publication date Sep 12, 2019
- KLA-Tencor Corporation
- Jingshan Zhong
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Nuisance Reduction Using Location-Based Attributes
- Publication number 20190050974
- Publication date Feb 14, 2019
- KLA-Tencor Corporation
- Bjorn Brauer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Repeater Defect Detection
- Publication number 20180348147
- Publication date Dec 6, 2018
- KLA-Tencor Corporation
- Eugene Shifrin
- G01 - MEASURING TESTING
Information Patent Application
WAFER INSPECTION USING DIFFERENCE IMAGES
- Publication number 20180342051
- Publication date Nov 29, 2018
- KLA-Tencor Corporation
- Abdurrahman Sezginer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Dynamic Care Areas for Defect Detection
- Publication number 20180276808
- Publication date Sep 27, 2018
- KLA-Tencor Corporation
- Bjorn Brauer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEMS AND METHODS FOR DETECTING DEFECTS ON A WAFER
- Publication number 20180202943
- Publication date Jul 19, 2018
- KLA-Tencor Corporation
- Lu Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH SENSITIVITY REPEATER DEFECT DETECTION
- Publication number 20180130199
- Publication date May 10, 2018
- KLA-Tencor Corporation
- Bjorn Brauer
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHODS FOR FINDING A BEST APERTURE AND MODE TO ENHAN...
- Publication number 20170307545
- Publication date Oct 26, 2017
- KLA-Tencor Corporation
- Pavel Kolchin
- G01 - MEASURING TESTING
Information Patent Application
System and Method for Defining Care Areas in Repeating Structures o...
- Publication number 20170286589
- Publication date Oct 5, 2017
- KLA-Tencor Corporation
- Junqing Huang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Adaptive Local Threshold and Color Filtering
- Publication number 20170287128
- Publication date Oct 5, 2017
- KLA-Tencor Corporation
- Junqing Huang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IMAGE BASED SPECIMEN PROCESS CONTROL
- Publication number 20170200264
- Publication date Jul 13, 2017
- KLA-Tencor Corporation
- Allen Park
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
GENERATING HIGH RESOLUTION IMAGES FROM LOW RESOLUTION IMAGES FOR SE...
- Publication number 20170193680
- Publication date Jul 6, 2017
- KLA-Tencor Corporation
- Jing Zhang
- G01 - MEASURING TESTING
Information Patent Application
Optical Die to Database Inspection
- Publication number 20170191948
- Publication date Jul 6, 2017
- KLA-Tencor Corporation
- Lisheng Gao
- G01 - MEASURING TESTING
Information Patent Application
Design Based Sampling and Binning for Yield Critical Defects
- Publication number 20170103517
- Publication date Apr 13, 2017
- KLA-Tencor Corporation
- Satya Kurada
- G01 - MEASURING TESTING
Information Patent Application
Detecting Defects on a Wafer Using Defect-Specific and Multi-Channe...
- Publication number 20170091925
- Publication date Mar 30, 2017
- KLA-Tencor Corporation
- Kenong Wu
- G01 - MEASURING TESTING
Information Patent Application
Intra-Die Defect Detection
- Publication number 20160321800
- Publication date Nov 3, 2016
- KLA-Tencor Corporation
- Govindarajan Thattaisundaram
- G01 - MEASURING TESTING
Information Patent Application
Optical Die to Database Inspection
- Publication number 20160290934
- Publication date Oct 6, 2016
- KLA-Tencor Corporation
- Keith Wells
- G01 - MEASURING TESTING
Information Patent Application
Sub-Pixel Alignment of Inspection to Design
- Publication number 20160275672
- Publication date Sep 22, 2016
- KLA-Tencor Corporation
- Santosh Bhattacharyya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
WAFER AND RETICLE INSPECTION SYSTEMS AND METHODS FOR SELECTING ILLU...
- Publication number 20160266047
- Publication date Sep 15, 2016
- KLA-Tencor Corporation
- Grace H. Chen
- G01 - MEASURING TESTING
Information Patent Application
Design Based Sampling and Binning for Yield Critical Defects
- Publication number 20160225138
- Publication date Aug 4, 2016
- KLA-Tencor Corporation
- Satya Kurada
- G01 - MEASURING TESTING
Information Patent Application
Visual Feedback for Inspection Algorithms and Filters
- Publication number 20160210526
- Publication date Jul 21, 2016
- KLA-Tencor Corporation
- Hucheng Lee
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Alignment of Inspection to Design Using Built in Targets
- Publication number 20160188784
- Publication date Jun 30, 2016
- KLA-Tencor Corporation
- Santosh Bhattacharyya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Defect Detection Using Structural Information
- Publication number 20160104600
- Publication date Apr 14, 2016
- KLA-Tencor Corporation
- Qing Luo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Detecting Defects on a Wafer Using Defect-Specific Information
- Publication number 20160071256
- Publication date Mar 10, 2016
- KLA-Tencor Corporation
- Kenong Wu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Detecting Defects on a Wafer Using Defect-Specific and Multi-Channe...
- Publication number 20160027165
- Publication date Jan 28, 2016
- KLA-Tencor Corporation
- Kenong Wu
- G01 - MEASURING TESTING
Information Patent Application
Automatic Recipe Stability Monitoring and Reporting
- Publication number 20150362908
- Publication date Dec 17, 2015
- KLA-Tencor Corporation
- Hucheng Lee
- G05 - CONTROLLING REGULATING
Information Patent Application
DEFECT DETECTION AND CLASSIFICATION BASED ON ATTRIBUTES DETERMINED...
- Publication number 20150221076
- Publication date Aug 6, 2015
- KLA-Tencor Corporation
- Lisheng Gao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Context-Based Inspection for Dark Field Inspection
- Publication number 20150178907
- Publication date Jun 25, 2015
- KLA-Tencor Corporation
- Yong Zhang
- G06 - COMPUTING CALCULATING COUNTING

Lisheng Gao

Person

Patents Grantslast 30 patents

Wafer inspection using difference images

Method and system for correlating optical images with scanning elec...

Repeater defect detection

Repeater defect detection

Generating high resolution images from low resolution images for se...

Systems and methods for detecting defects on a wafer

Nuisance reduction using location-based attributes

Dynamic care areas for defect detection

Visual feedback for inspection algorithms and filters

Automatic recipe stability monitoring and reporting

Method and system for correlating optical images with scanning elec...

Intra-die defect detection

Adaptive local threshold and color filtering

High sensitivity repeater defect detection

System and method for defining care areas in repeating structures o...

Methods and systems for monitoring a non-defect related characteris...

Image based specimen process control

Apparatus and methods for finding a best aperture and mode to enhan...

Defect detection and classification based on attributes determined...

Optical die to database inspection

Sub-pixel alignment of inspection to design

Optical die to database inspection

Systems and methods for detecting defects on a wafer

Detecting defects on a wafer using defect-specific and multi-channe...

Alignment of inspection to design using built in targets

Defect detection using structural information

Apparatus and methods for finding a best aperture and mode to enhan...

Detecting defects on a wafer using defect-specific information

Context-based inspection for dark field inspection

Adaptive local threshold and color filtering

Patents Applicationslast 30 patents

Repeater Defect Detection

Method and System for Correlating Optical Images with Scanning Elec...

PREVIOUS LAYER NUISANCE REDUCTION THROUGH OBLIQUE ILLUMINATION

Nuisance Reduction Using Location-Based Attributes

Repeater Defect Detection

WAFER INSPECTION USING DIFFERENCE IMAGES

Dynamic Care Areas for Defect Detection

SYSTEMS AND METHODS FOR DETECTING DEFECTS ON A WAFER

HIGH SENSITIVITY REPEATER DEFECT DETECTION

APPARATUS AND METHODS FOR FINDING A BEST APERTURE AND MODE TO ENHAN...

System and Method for Defining Care Areas in Repeating Structures o...

Adaptive Local Threshold and Color Filtering

IMAGE BASED SPECIMEN PROCESS CONTROL

GENERATING HIGH RESOLUTION IMAGES FROM LOW RESOLUTION IMAGES FOR SE...

Optical Die to Database Inspection

Design Based Sampling and Binning for Yield Critical Defects

Detecting Defects on a Wafer Using Defect-Specific and Multi-Channe...

Intra-Die Defect Detection

Optical Die to Database Inspection

Sub-Pixel Alignment of Inspection to Design

WAFER AND RETICLE INSPECTION SYSTEMS AND METHODS FOR SELECTING ILLU...

Design Based Sampling and Binning for Yield Critical Defects

Visual Feedback for Inspection Algorithms and Filters

Alignment of Inspection to Design Using Built in Targets

Defect Detection Using Structural Information

Detecting Defects on a Wafer Using Defect-Specific Information

Detecting Defects on a Wafer Using Defect-Specific and Multi-Channe...

Automatic Recipe Stability Monitoring and Reporting

DEFECT DETECTION AND CLASSIFICATION BASED ON ATTRIBUTES DETERMINED...

Context-Based Inspection for Dark Field Inspection