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Liu GUO-LIN
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Higashiyamato-shi, JP
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last 30 patents
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Patent Grant
Method of manufacturing an insulating film containing hafnium
Patent number
7,838,439
Issue date
Nov 23, 2010
Semiconductor Technology Academic Research Center
Masaharu Oshima
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
METHOD OF MANUFACTURING AN INSULATING FILM CONTAINING HAFNIUM
Publication number
20090004886
Publication date
Jan 1, 2009
Masaharu OSHIMA
H01 - BASIC ELECTRIC ELEMENTS