Liu Lianjun

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Singapore, SG

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Patents Grantslast 30 patents

Information Patent Grant
Method for preventing titanium lifting during and after metal etching
- Patent number 5,705,428
- Issue date Jan 6, 1998
- Chartered Semiconductor Manufacturing Pte, Ltd.
- Lianjun Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry etch process for titanium-tungsten films
- Patent number 5,609,775
- Issue date Mar 11, 1997
- Chartered Semiconductor Manufacturing Pte Ltd
- Lianjun Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced metal etch process
- Patent number 5,582,679
- Issue date Dec 10, 1996
- Chartered Semiconductor Manufacturing Pte Ltd
- Liu Lianjun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of beveled contact opening formation
- Patent number 5,453,403
- Issue date Sep 26, 1995
- Chartered Semiconductor Manufacturing Pte, Ltd.
- Teo Y. Meng
- H01 - BASIC ELECTRIC ELEMENTS