Liza Palma

Follow

Person

Manteca, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chucks and methods for refurbishing same
- Patent number 8,968,503
- Issue date Mar 3, 2015
- Novellus Systems, Inc.
- Alisa Hart
- B32 - LAYERED PRODUCTS
Information Patent Grant
Electrostatic chucks and methods for refurbishing same
- Patent number 8,597,448
- Issue date Dec 3, 2013
- Novellus Systems, Inc.
- Alisa Hart
- B32 - LAYERED PRODUCTS

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CHUCKS AND METHODS FOR REFURBISHING SAME
- Publication number 20140124123
- Publication date May 8, 2014
- Novellus Systems, Inc.
- Alisa Hart
- B32 - LAYERED PRODUCTS
Information Patent Application
ELECTROSTATIC CHUCKS AND METHODS FOR REFURBISHING SAME
- Publication number 20110155299
- Publication date Jun 30, 2011
- Alisa Hart
- B32 - LAYERED PRODUCTS