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Lizhong Sun
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Newark, DE, US
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last 30 patents
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Patent Grant
Apparatus for photoelectrochemical polishing of silicon wafers
Patent number
6,319,370
Issue date
Nov 20, 2001
Rodel Holdings Inc.
Lizhong Sun
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Method for photoelectrochemical polishing of silicon wafers
Patent number
6,074,546
Issue date
Jun 13, 2000
Rodel Holdings, Inc.
Lizhong Sun
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR