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Lloyd Lee
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Manchacha, TX, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method and system to compensate for lamp intensity differences in a...
Patent number
7,680,321
Issue date
Mar 16, 2010
Tokyo Electron Limited
David Dixon
G01 - MEASURING TESTING
Information
Patent Grant
Method of real time dynamic CD control
Patent number
7,625,680
Issue date
Dec 1, 2009
Tokyo Electron Limited
Lloyd Lee
G01 - MEASURING TESTING
Information
Patent Grant
Method and system to compensate for lamp intensity differences in a...
Patent number
7,359,545
Issue date
Apr 15, 2008
Tokyo Electron Limited
David Dixon
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND SYSTEM TO COMPENSATE FOR LAMP INTENSITY DIFFERENCES IN A...
Publication number
20080218745
Publication date
Sep 11, 2008
TOKYO ELECTRON LIMITED
David Dixon
G01 - MEASURING TESTING
Information
Patent Application
METHOD OF REAL TIME DYNAMIC CD CONTROL
Publication number
20080081271
Publication date
Apr 3, 2008
TOKYO ELECTRON LIMITED
Lloyd Lee
G01 - MEASURING TESTING
Information
Patent Application
Method and system to compensate for lamp intensity differences in a...
Publication number
20050146716
Publication date
Jul 7, 2005
TOKYO ELECTRON LIMITED
David Dixon
G01 - MEASURING TESTING