Lois Wride

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Valley View, AU

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Patents Grantslast 30 patents

Information Patent Grant
Method and system for rotating a semiconductor wafer in processing...
- Patent number 6,770,146
- Issue date Aug 3, 2004
- Mattson Technology, Inc.
- Zion Koren
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...