Lokesh Subramany

Person

Clifton Park, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Planar metrology pad adjacent a set of fins of a fin field effect t...
- Patent number 10,121,711
- Issue date Nov 6, 2018
- GLOBALFOUNDRIES Inc.
- Sipeng Gu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Decoupling measurement of layer thicknesses of a plurality of layer...
- Patent number 9,281,249
- Issue date Mar 8, 2016
- GLOBALFOUNDRIES Inc.
- Alok Vaid
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for fabricating semiconductor device structures
- Patent number 9,177,873
- Issue date Nov 3, 2015
- GLOBALFOUNDRIES, INC.
- Alok Vaid
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Planar metrology pad adjacent a set of fins of a fin field effect t...
- Patent number 9,129,905
- Issue date Sep 8, 2015
- GLOBALFOUNDRIES Inc.
- Xiang Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Planar metrology pad adjacent a set of fins of a fin field effect t...
- Patent number 9,121,890
- Issue date Sep 1, 2015
- GLOBALFOUNDRIES Inc.
- Sipeng Gu
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
PLANAR METROLOGY PAD ADJACENT A SET OF FINS IN A FIN FIELD EFFECT T...
- Publication number 20150348913
- Publication date Dec 3, 2015
- GLOBALFOUNDRIES INC.
- Xiang Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLANAR METROLOGY PAD ADJACENT A SET OF FINS OF A FIN FIELD EFFECT T...
- Publication number 20150340296
- Publication date Nov 26, 2015
- GLOBALFOUNDRIES INC.
- Sipeng Gu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DECOUPLING MEASUREMENT OF LAYER THICKNESSES OF A PLURALITY OF LAYER...
- Publication number 20150198435
- Publication date Jul 16, 2015
- GLOBALFOUNDRIES INC.
- Alok VAID
- G01 - MEASURING TESTING
Information Patent Application
PLANAR METROLOGY PAD ADJACENT A SET OF FINS OF A FIN FIELD EFFECT T...
- Publication number 20150123212
- Publication date May 7, 2015
- GLOBALFOUNDRIES INC.
- Xiang Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLANAR METROLOGY PAD ADJACENT A SET OF FINS OF A FIN FIELD EFFECT T...
- Publication number 20150115267
- Publication date Apr 30, 2015
- GLOBALFOUNDRIES INC.
- Sipeng Gu
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND METHODS FOR FABRICATING SEMICONDUCTOR DEVICE STRUCTURES
- Publication number 20150033201
- Publication date Jan 29, 2015
- GLOBALFOUNDRIES, Inc.
- Alok Vaid
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ENHANCING RESOLUTION IN LITHOGRAPHIC PROCESSES USING HIGH REFRACTIV...
- Publication number 20140211175
- Publication date Jul 31, 2014
- GLOBALFOUNDRIES INC.
- Lokesh Subramany
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Lokesh Subramany

Person

Patents Grantslast 30 patents

Planar metrology pad adjacent a set of fins of a fin field effect t...

Decoupling measurement of layer thicknesses of a plurality of layer...

Systems and methods for fabricating semiconductor device structures

Planar metrology pad adjacent a set of fins of a fin field effect t...

Planar metrology pad adjacent a set of fins of a fin field effect t...

Patents Applicationslast 30 patents

PLANAR METROLOGY PAD ADJACENT A SET OF FINS IN A FIN FIELD EFFECT T...

PLANAR METROLOGY PAD ADJACENT A SET OF FINS OF A FIN FIELD EFFECT T...

DECOUPLING MEASUREMENT OF LAYER THICKNESSES OF A PLURALITY OF LAYER...

PLANAR METROLOGY PAD ADJACENT A SET OF FINS OF A FIN FIELD EFFECT T...

PLANAR METROLOGY PAD ADJACENT A SET OF FINS OF A FIN FIELD EFFECT T...

SYSTEMS AND METHODS FOR FABRICATING SEMICONDUCTOR DEVICE STRUCTURES

ENHANCING RESOLUTION IN LITHOGRAPHIC PROCESSES USING HIGH REFRACTIV...