Long Ma

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Time-dependent defect inspection apparatus
- Patent number 11,651,935
- Issue date May 16, 2023
- ASML Netherlands B.V.
- Chih-Yu Jen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer inspection based on electron beam induced current
- Patent number 11,501,949
- Issue date Nov 15, 2022
- ASML Netherlands B.V.
- Long Ma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for scanning a sample using multi-beam inspection...
- Patent number 11,469,076
- Issue date Oct 11, 2022
- ASML Netherlands B.V.
- Martinus Gerardus Maria Johannes Massen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for detecting time-dependent defects in a fast...
- Patent number 11,175,248
- Issue date Nov 16, 2021
- ASML Netherlands B.V.
- Long Ma
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Time-dependent defect inspection apparatus
- Patent number 11,056,311
- Issue date Jul 6, 2021
- ASML Netherlands B.V.
- Chih-Yu Jen
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS FOR SIGNAL ELECTRON DETECTION IN AN INSPECTION...
- Publication number 20230298851
- Publication date Sep 21, 2023
- ASML NETHERLANDS B.V.
- Chih-Yu JEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR SCANNING A SAMPLE USING MULTI-BEAM INSPECTION...
- Publication number 20230274906
- Publication date Aug 31, 2023
- ASML NETHERLANDS B.V.
- Martinus Gerardus, Maria, Johannes MAASSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR HIGH THROUGHPUT DEFECT INSPECTION IN A CHARGE...
- Publication number 20230116381
- Publication date Apr 13, 2023
- ASML NETHERLANDS B.V.
- Long MA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TIME-DEPENDENT DEFECT INSPECTION APPARATUS
- Publication number 20220005666
- Publication date Jan 6, 2022
- ASML NETHERLANDS B.V.
- Chih-Yu JEN
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR SCANNING A SAMPLE USING MULTI-BEAM INSPECTION...
- Publication number 20210217582
- Publication date Jul 15, 2021
- ASML NETHERLANDS B.V.
- Martinus Gerardus, Maria, Johannes MAASSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER INSPECTION BASED ON ELECTRON BEAM INDUCED CURRENT
- Publication number 20210134556
- Publication date May 6, 2021
- ASML NETHERLANDS B.V.
- Long MA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR DETECTING TIME-DEPENDENT DEFECTS IN A FAST...
- Publication number 20200088659
- Publication date Mar 19, 2020
- ASML NETHERLANDS B.V.
- Long MA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
TIME-DEPENDENT DEFECT INSPECTION APPARATUS
- Publication number 20200075287
- Publication date Mar 5, 2020
- ASML NETHERLANDS B.V.
- Chih-Yu Jen
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Time-dependent defect inspection apparatus

Wafer inspection based on electron beam induced current

System and method for scanning a sample using multi-beam inspection...

Apparatus and method for detecting time-dependent defects in a fast...

Time-dependent defect inspection apparatus

Patents Applicationslast 30 patents

SYSTEMS AND METHODS FOR SIGNAL ELECTRON DETECTION IN AN INSPECTION...

SYSTEM AND METHOD FOR SCANNING A SAMPLE USING MULTI-BEAM INSPECTION...

SYSTEM AND METHOD FOR HIGH THROUGHPUT DEFECT INSPECTION IN A CHARGE...

TIME-DEPENDENT DEFECT INSPECTION APPARATUS

SYSTEM AND METHOD FOR SCANNING A SAMPLE USING MULTI-BEAM INSPECTION...

WAFER INSPECTION BASED ON ELECTRON BEAM INDUCED CURRENT

APPARATUS AND METHOD FOR DETECTING TIME-DEPENDENT DEFECTS IN A FAST...

TIME-DEPENDENT DEFECT INSPECTION APPARATUS