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Long-Yi Chen
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Changhua County, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Method for forming semiconductor device structure with overlay grating
Patent number
10,867,933
Issue date
Dec 15, 2020
Taiwan Semiconductor Manufacturing Co., Ltd
Long-Yi Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming semiconductor device structure with overlay grating
Patent number
10,734,325
Issue date
Aug 4, 2020
Taiwan Semiconductor Manufacturing Co., Ltd
Long-Yi Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming semiconductor device structure with overlay grating
Patent number
10,461,037
Issue date
Oct 29, 2019
Taiwan Semiconductor Manufacturing Co., Ltd
Long-Yi Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor metrology target and manufacturing method thereof
Patent number
10,204,867
Issue date
Feb 12, 2019
Taiwan Semiconductor Manufacturing Co., Ltd
Long-Yi Chen
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR FORMING SEMICONDUCTOR DEVICE STRUCTURE WITH OVERLAY GRATING
Publication number
20200365520
Publication date
Nov 19, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Long-Yi CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING SEMICONDUCTOR DEVICE STRUCTURE WITH OVERLAY GRATING
Publication number
20200058595
Publication date
Feb 20, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Long-Yi CHEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR FORMING SEMICONDUCTOR DEVICE STRUCTURE WITH OVERLAY GRATING
Publication number
20190131190
Publication date
May 2, 2019
Taiwan Semiconductor Manufacturing Co., Ltd.
Long-Yi CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR METROLOGY TARGET AND MANUFACTURING METHOD THEREOF
Publication number
20190067203
Publication date
Feb 28, 2019
Taiwan Semiconductor Manufacturing Co., Ltd.
Long-Yi CHEN
G06 - COMPUTING CALCULATING COUNTING