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Longchang Ni
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Pittsburgh, PA, US
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last 30 patents
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Patent Application
MICRO-ELECTROMECHANICAL SYSTEM (MEMS) INCLUDING TANTALUM AS A STRUC...
Publication number
20230271822
Publication date
Aug 31, 2023
Carnegie Mellon University
Maarten P. de Boer
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
MEMS PLATFORM FOR THIN FILM NANOMECHANICS CHARACTERIZATION
Publication number
20230187167
Publication date
Jun 15, 2023
Carnegie Mellon University
Maarten de Boer
B81 - MICRO-STRUCTURAL TECHNOLOGY