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Lorraine Ellen YOUNG
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San Jose, CA, US
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last 30 patents
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Patent Grant
Enhanced defect detection in electron beam inspection and review
Patent number
9,449,788
Issue date
Sep 20, 2016
KLA-Tencor Corporation
Gary G. Fan
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
ENHANCED DEFECT DETECTION IN ELECTRON BEAM INSPECTION AND REVIEW
Publication number
20150090877
Publication date
Apr 2, 2015
KLA-Tencor Corporation
Gary G. FAN
G01 - MEASURING TESTING