Lothar Gail

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Wiesbaden, DE

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Patents Grantslast 30 patents

Information Patent Grant
Device for sealing a projection exposure apparatus
- Patent number 7,130,017
- Issue date Oct 31, 2006
- Carl Zeiss SMT AG
- Albrecht Hof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for air guidance in a processing chamber
- Patent number 6,619,901
- Issue date Sep 16, 2003
- Robert Bosch GmbH
- Berthold Duethorn
- F24 - HEATING RANGES VENTILATING

Patents Applicationslast 30 patents

Information Patent Application
Device for sealing a projection exposure apparatus
- Publication number 20050206860
- Publication date Sep 22, 2005
- Carl Zeiss SMT AG
- Albrecht Hof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY