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Lothar Kulzer
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Pettendorf/Adlersberg, DE
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last 30 patents
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Patent Grant
Optical module for guiding a radiation beam
Patent number
9,116,440
Issue date
Aug 25, 2015
Carl Zeiss SMT GmbH
Markus Hauf
G02 - OPTICS
Patents Applications
last 30 patents
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Patent Application
OPTICAL MODULE FOR GUIDING A RADIATION BEAM
Publication number
20140211187
Publication date
Jul 31, 2014
Carl Zeiss SMT GMBH
Markus Hauf
G02 - OPTICS
Information
Patent Application
OPTICAL MODULE FOR GUIDING A RADIATION BEAM
Publication number
20120044474
Publication date
Feb 23, 2012
Carl Zeiss SMT GMBH
Markus Hauf
G02 - OPTICS