Louie Liu

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Hsin-Chu, TW

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Patents Grantslast 30 patents

Information Patent Grant
Method to predict and identify defocus wafers
- Patent number 7,301,604
- Issue date Nov 27, 2007
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Hung Lin
- G01 - MEASURING TESTING
Information Patent Grant
Method of wafer height mapping
- Patent number 6,975,407
- Issue date Dec 13, 2005
- Taiwan Semiconductor Manufacturing Co, Ltd.
- Chun-Sheng Wang
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Method for reducing mask precipitation defects
- Publication number 20060201848
- Publication date Sep 14, 2006
- Ting-Yu Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for reducing spin-induced wafer charging
- Publication number 20060000109
- Publication date Jan 5, 2006
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hua-Tai Lin
- B08 - CLEANING
Information Patent Application
METHOD OF WAFER HEIGHT MAPPING
- Publication number 20050259272
- Publication date Nov 24, 2005
- Chun-Sheng Wang
- G01 - MEASURING TESTING
Information Patent Application
Wafer aligner with WEE (water edge exposure) function
- Publication number 20050248754
- Publication date Nov 10, 2005
- Chun-Sheng Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and system for reducing and monitoring precipitated defects...
- Publication number 20050191563
- Publication date Sep 1, 2005
- Yi-Ming Dai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method to predict and identify defocus wafers
- Publication number 20050185170
- Publication date Aug 25, 2005
- Chun-Hung Lin
- G01 - MEASURING TESTING