Louis Markoya

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Shelton, CT, US

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Patents Grantslast 30 patents

Information Patent Grant
Line width insensitive wafer target detection in two directions
- Patent number 5,966,215
- Issue date Oct 12, 1999
- SVG Lithography Systems, Inc.
- Louis Markoya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Line width insensitive wafer target detection
- Patent number 5,920,396
- Issue date Jul 6, 1999
- SVG Lithography Systems, Inc.
- Louis Markoya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY