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Louis P. Wainwright
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Beverly, MA, US
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last 30 patents
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Patent Grant
Systems and methods that mitigate contamination and modify surface...
Patent number
7,511,287
Issue date
Mar 31, 2009
Axcelis Technologies, Inc.
Ronald N. Reece
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
METHOD OF REDUCING TRANSIENT WAFER TEMPERATURE DURING IMPLANTATION
Publication number
20080023654
Publication date
Jan 31, 2008
Michael Graf
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Systems and methods that mitigate contamination and modify surface...
Publication number
20070075274
Publication date
Apr 5, 2007
Ronald N. Reece
H01 - BASIC ELECTRIC ELEMENTS