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Lowrence A. Clevenger
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LaGrangeville, NY, US
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last 30 patents
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Patent Grant
Micro-cavity MEMS device and method of fabricating same
Patent number
7,394,332
Issue date
Jul 1, 2008
International Business Machines Corporation
Louis C. Hsu
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Micro-cavity MEMS device and method of fabricating same
Publication number
20070046392
Publication date
Mar 1, 2007
International Business Machines Corporation
Louis C. Hsu
H01 - BASIC ELECTRIC ELEMENTS