Lu Xu

Person

Champaign, IL, US

People

Patents Grantslast 30 patents

Information Patent Grant
Dual RF for controllable film deposition
- Patent number 12,191,115
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nitrogen-doped carbon hardmask films
- Patent number 11,322,352
- Issue date May 3, 2022
- Applied Materials, Inc.
- Xiaoquan Min
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical microcavity for a high-contrast display
- Patent number 10,073,293
- Issue date Sep 11, 2018
- The Board of Trustees of the University of Illinois
- Paul V. Braun
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DIELECTRIC COATING FOR DEPOSITION CHAMBER
- Publication number 20220020589
- Publication date Jan 20, 2022
- Applied Materials, Inc.
- Lu Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NITROGEN-DOPED CARBON HARDMASK FILMS
- Publication number 20210327713
- Publication date Oct 21, 2021
- Applied Materials, Inc.
- Xiaoquan MIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL RF FOR CONTROLLABLE FILM DEPOSITION
- Publication number 20210159048
- Publication date May 27, 2021
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RESOLVING SPONTANEOUS ARCING DURING THICK FILM DEPOSITION OF HIGH T...
- Publication number 20210017645
- Publication date Jan 21, 2021
- Applied Materials, Inc.
- Lu XU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR CLEANING PROCESS CHAMBER
- Publication number 20200255940
- Publication date Aug 13, 2020
- Applied Materials, Inc.
- Byung Seok KWON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND TOOL FOR ELECTROSTATIC CHUCKING
- Publication number 20200249263
- Publication date Aug 6, 2020
- Applied Materials, Inc.
- Lu XU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Luminescent Solar Concentrators and Related Methods of Manufacturing
- Publication number 20190067504
- Publication date Feb 28, 2019
- California Institute of Technology
- David R. Needell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL MICROCAVITY FOR A HIGH-CONTRAST DISPLAY
- Publication number 20170293169
- Publication date Oct 12, 2017
- THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
- Paul V. Braun
- G02 - OPTICS

Person

Patents Grantslast 30 patents

Dual RF for controllable film deposition

Nitrogen-doped carbon hardmask films

Optical microcavity for a high-contrast display

Patents Applicationslast 30 patents

DIELECTRIC COATING FOR DEPOSITION CHAMBER

NITROGEN-DOPED CARBON HARDMASK FILMS

DUAL RF FOR CONTROLLABLE FILM DEPOSITION

RESOLVING SPONTANEOUS ARCING DURING THICK FILM DEPOSITION OF HIGH T...

METHOD FOR CLEANING PROCESS CHAMBER

METHOD AND TOOL FOR ELECTROSTATIC CHUCKING

Luminescent Solar Concentrators and Related Methods of Manufacturing

OPTICAL MICROCAVITY FOR A HIGH-CONTRAST DISPLAY