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Patents Grants
last 30 patents
Information
Patent Grant
Method for correcting disturbances in a level sensor light path
Patent number
7,751,059
Issue date
Jul 6, 2010
ASML Netherlands B.V.
Nicolaas Antonius Allegondus Johannes Van Asten
G01 - MEASURING TESTING
Information
Patent Grant
Lithographic apparatus and method for manufacturing a device
Patent number
7,542,127
Issue date
Jun 2, 2009
ASML Netherlands B.V.
Timotheus Franciscus Sengers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for correcting disturbances in a level sensor light path
Patent number
7,411,667
Issue date
Aug 12, 2008
ASML Netherlands B.V.
Nicolaas Antonius Allegondus Johannes Van Asten
G01 - MEASURING TESTING
Information
Patent Grant
Lithographic apparatus and method for determining Z position errors...
Patent number
7,333,174
Issue date
Feb 19, 2008
ASML Netherlands, B.V.
Willem Herman Gertruda Anna Koenen
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR CORRECTING DISTURBANCES IN A LEVEL SENSOR LIGHT PATH
Publication number
20080309915
Publication date
Dec 18, 2008
ASML NETHERLANDS B.V.
Nicolaas Antonius Allegondus Johannes Van Asten
G01 - MEASURING TESTING
Information
Patent Application
Lithographic apparatus and method for manufacturing a device
Publication number
20070139629
Publication date
Jun 21, 2007
ASML NETHERLANDS B.V.
Timotheus Franciscus Sengers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for correcting disturbances in a level sensor light path
Publication number
20070013915
Publication date
Jan 18, 2007
ASML NETHERLANDS B.V.
Nicolaas Antonius Allegondus Johannes Van Asten
G01 - MEASURING TESTING
Information
Patent Application
Method for correcting disturbances in a level sensor light path
Publication number
20060274324
Publication date
Dec 7, 2006
ASML NETHERLANDS B.V.
Nicolaas Antonius Allegondus Johannes Van Asten
G01 - MEASURING TESTING
Information
Patent Application
Lithographic apparatus and method for determining Z position errors...
Publication number
20060170892
Publication date
Aug 3, 2006
ASML NETHERLANDS B.V.
Willem Herman Gertruda Anna Koenen
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Lithographic apparatus and method for determining Z position errors...
Publication number
20060139595
Publication date
Jun 29, 2006
ASML NETHERLANDS B.V.
Willem Herman Gertruda Anna Koenen
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR