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Luc Tantart
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Palaiseau, FR
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last 30 patents
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Patent Grant
Compact spectroscopic ellipsometer
Patent number
7,230,701
Issue date
Jun 12, 2007
Societe de Production et de Recherches Appliquees
Jean-Louis Stehle
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
Compact spectroscopic ellipsometer
Publication number
20040070760
Publication date
Apr 15, 2004
Jean-Louis Stehle
G01 - MEASURING TESTING