Luca Grella

Person

Gilroy, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Cold-field-emitter electron gun with self-cleaning extractor using...
- Patent number 11,830,699
- Issue date Nov 28, 2023
- KLA Corporation
- Luca Grella
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods of creating multiple electron beams
- Patent number 11,651,934
- Issue date May 16, 2023
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High resolution electron beam apparatus with dual-aperture schemes
- Patent number 11,508,591
- Issue date Nov 22, 2022
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Space charge insensitive electron gun designs
- Patent number 11,302,510
- Issue date Apr 12, 2022
- KLA-Tencor Corporation
- Christopher Sears
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charge control device for a system with multiple electron beams
- Patent number 11,087,950
- Issue date Aug 10, 2021
- KLA-Tencor Corporation
- Christopher Sears
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for charge control for imaging floating metal str...
- Patent number 10,460,903
- Issue date Oct 29, 2019
- KLA-Tencor Corporation
- Arjun Hegde
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extractor electrode for electron source
- Patent number 9,934,933
- Issue date Apr 3, 2018
- KLA-Tencor Corporation
- Laurence S. Hordon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron reflector with multiple reflective modes
- Patent number 8,089,051
- Issue date Jan 3, 2012
- KLA-Tencor Corporation
- Luca Grella
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam patterning
- Patent number 7,958,464
- Issue date Jun 7, 2011
- KLA-Tencor Corporation
- Luca Grella
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Dynamic pattern generator with cup-shaped structure
- Patent number 7,755,061
- Issue date Jul 13, 2010
- KLA-Tencor Technologies Corporation
- Luca Grella
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Calibration standards and methods
- Patent number 7,361,941
- Issue date Apr 22, 2008
- KLA-Tencor Technologies Corporation
- Gian F. Lorusso
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for e-beam scanning
- Patent number 7,276,690
- Issue date Oct 2, 2007
- KLA-Tencor Technologies Corporation
- Gian Francesco Lorusso
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for accurate e-beam metrology
- Patent number 7,098,456
- Issue date Aug 29, 2006
- KLA-Tencor Technologies Corporation
- Gian Francesco Lorusso
- G01 - MEASURING TESTING
Information Patent Grant
E-beam detection of defective contacts/vias with flooding and energ...
- Patent number 7,019,292
- Issue date Mar 28, 2006
- KLA-Tencor Technologies Corporation
- Frank Y. H. Fan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for tilted particle-beam illumination
- Patent number 7,009,177
- Issue date Mar 7, 2006
- KLA-Tencor Technologies Corporation
- Marian Mankos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Filtered e-beam inspection and review
- Patent number 6,979,824
- Issue date Dec 27, 2005
- KLA-Tencor Technologies Corporation
- David L. Adler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for e-beam scanning
- Patent number 6,815,675
- Issue date Nov 9, 2004
- KLA-Tencor Technologies Corporation
- Gian Francesco Lorusso
- G01 - MEASURING TESTING
Information Patent Grant
Filtered e-beam inspection and review
- Patent number 6,797,955
- Issue date Sep 28, 2004
- KLA-Tencor Technologies Corporation
- David L. Adler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Undercut measurement using SEM
- Patent number 6,670,612
- Issue date Dec 30, 2003
- KLA-Tencor Technologies Corporation
- Gian Francesco Lorusso
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Systems and Methods of Creating Multiple Electron Beams
- Publication number 20230109032
- Publication date Apr 6, 2023
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cold-Field-Emitter Electron Gun with Self-Cleaning Extractor Using...
- Publication number 20230010176
- Publication date Jan 12, 2023
- KLA Corporation
- Luca Grella
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH RESOLUTION ELECTRON BEAM APPARATUS WITH DUAL-APERTURE SCHEMES
- Publication number 20220254667
- Publication date Aug 11, 2022
- KLA Corporation
- Xinrong Jiang
- G01 - MEASURING TESTING
Information Patent Application
Space Charge Insensitive Electron Gun Designs
- Publication number 20190371564
- Publication date Dec 5, 2019
- KLA-Tencor Corporation
- Christopher Sears
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGE CONTROL DEVICE FOR A SYSTEM WITH MULTIPLE ELECTRON BEAMS
- Publication number 20190371566
- Publication date Dec 5, 2019
- KLA-Tencor Corporation
- Christopher Sears
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and System for Charge Control for Imaging Floating Metal Str...
- Publication number 20170287675
- Publication date Oct 5, 2017
- KLA-Tencor Corporation
- Arjun Hegde
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Reflector With Multiple Reflective Modes
- Publication number 20110204251
- Publication date Aug 25, 2011
- Luca GRELLA
- B82 - NANO-TECHNOLOGY
Information Patent Application
Dynamic pattern generator with cup-shaped structure
- Publication number 20090114837
- Publication date May 7, 2009
- LUCA GRELLA
- B82 - NANO-TECHNOLOGY
Information Patent Application
UNDERCUT MEASUREMENT USING SEM
- Publication number 20040000638
- Publication date Jan 1, 2004
- Gian Francesco Lorusso
- G01 - MEASURING TESTING

Luca Grella

Person

Patents Grantslast 30 patents

Cold-field-emitter electron gun with self-cleaning extractor using...

Systems and methods of creating multiple electron beams

High resolution electron beam apparatus with dual-aperture schemes

Space charge insensitive electron gun designs

Charge control device for a system with multiple electron beams

Method and system for charge control for imaging floating metal str...

Extractor electrode for electron source

Electron reflector with multiple reflective modes

Electron beam patterning

Dynamic pattern generator with cup-shaped structure

Calibration standards and methods

Method and system for e-beam scanning

Method and apparatus for accurate e-beam metrology

E-beam detection of defective contacts/vias with flooding and energ...

Apparatus and method for tilted particle-beam illumination

Filtered e-beam inspection and review

Method and system for e-beam scanning

Filtered e-beam inspection and review

Undercut measurement using SEM

Patents Applicationslast 30 patents

Systems and Methods of Creating Multiple Electron Beams

Cold-Field-Emitter Electron Gun with Self-Cleaning Extractor Using...

HIGH RESOLUTION ELECTRON BEAM APPARATUS WITH DUAL-APERTURE SCHEMES

Space Charge Insensitive Electron Gun Designs

CHARGE CONTROL DEVICE FOR A SYSTEM WITH MULTIPLE ELECTRON BEAMS

Method and System for Charge Control for Imaging Floating Metal Str...

Electron Reflector With Multiple Reflective Modes

Dynamic pattern generator with cup-shaped structure

UNDERCUT MEASUREMENT USING SEM