LUCIANA MELI THOMPSON

Person

ALBANY, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
EUV pattern transfer using graded hardmask
- Patent number 11,681,213
- Issue date Jun 20, 2023
- International Business Machines Corporation
- Nelson Felix
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Line break repairing layer for extreme ultraviolet patterning stacks
- Patent number 11,300,881
- Issue date Apr 12, 2022
- International Business Machines Corporation
- Luciana Meli Thompson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming barrier free contact for metal interconnects
- Patent number 10,879,107
- Issue date Dec 29, 2020
- International Business Machines Corporation
- Ashim Dutta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tone reversal during EUV pattern transfer using surface active laye...
- Patent number 10,615,037
- Issue date Apr 7, 2020
- International Business Machines Corporation
- Ashim Dutta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Post-lithography defect inspection using an e-beam inspection tool
- Patent number 10,578,981
- Issue date Mar 3, 2020
- International Business Machines Corporation
- Luciana Meli Thompson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Post-lithography defect inspection using an e-beam inspection tool
- Patent number 10,539,884
- Issue date Jan 21, 2020
- International Business Machines Corporation
- Luciana Meli Thompson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Determination of lithography effective dose uniformity
- Patent number 10,281,826
- Issue date May 7, 2019
- International Business Machines Corporation
- Daniel A. Corliss
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Determination of lithography effective dose uniformity
- Patent number 10,274,836
- Issue date Apr 30, 2019
- International Business Machines Corporation
- Daniel A. Corliss
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SOLVENT ANNEALING OF AN ORGANIC PLANARIZATION LAYER
- Publication number 20230197437
- Publication date Jun 22, 2023
- International Business Machines Corporation
- Jing Guo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EUV Pattern Transfer Using Graded Hardmask
- Publication number 20200272045
- Publication date Aug 27, 2020
- International Business Machines Corporation
- Nelson Felix
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING BARRIER FREE CONTACT FOR METAL INTERCONNECTS
- Publication number 20200144107
- Publication date May 7, 2020
- International Business Machines Corporation
- Ashim Dutta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINE BREAK REPAIRING LAYER FOR EXTREME ULTRAVIOLET PATTERNING STACKS
- Publication number 20200124972
- Publication date Apr 23, 2020
- International Business Machines Corporation
- Luciana MELI THOMPSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TONE REVERSAL DURING EUV PATTERN TRANSFER USING SURFACE ACTIVE LAYE...
- Publication number 20200058501
- Publication date Feb 20, 2020
- International Business Machines Corporation
- Ashim Dutta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POST-LITHOGRAPHY DEFECT INSPECTION USING AN E-BEAM INSPECTION TOOL
- Publication number 20200033733
- Publication date Jan 30, 2020
- International Business Machines Corporation
- Luciana Meli Thompson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POST-LITHOGRAPHY DEFECT INSPECTION USING AN E-BEAM INSPECTION TOOL
- Publication number 20190258171
- Publication date Aug 22, 2019
- International Business Machines Corporation
- Luciana Meli Thompson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHOTORESIST PATTERNING ON SILICON NITRIDE
- Publication number 20190101829
- Publication date Apr 4, 2019
- International Business Machines Corporation
- Indira P. Seshadri
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETERMINATION OF LITHOGRAPHY EFFECTIVE DOSE UNIFORMITY
- Publication number 20180373164
- Publication date Dec 27, 2018
- International Business Machines Corporation
- DANIEL A. CORLISS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETERMINATION OF LITHOGRAPHY EFFECTIVE DOSE UNIFORMITY
- Publication number 20180373165
- Publication date Dec 27, 2018
- International Business Machines Corporation
- DANIEL A. CORLISS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

LUCIANA MELI THOMPSON

Person

Patents Grantslast 30 patents

EUV pattern transfer using graded hardmask

Line break repairing layer for extreme ultraviolet patterning stacks

Method of forming barrier free contact for metal interconnects

Tone reversal during EUV pattern transfer using surface active laye...

Post-lithography defect inspection using an e-beam inspection tool

Post-lithography defect inspection using an e-beam inspection tool

Determination of lithography effective dose uniformity

Determination of lithography effective dose uniformity

Patents Applicationslast 30 patents

SOLVENT ANNEALING OF AN ORGANIC PLANARIZATION LAYER

EUV Pattern Transfer Using Graded Hardmask

METHOD OF FORMING BARRIER FREE CONTACT FOR METAL INTERCONNECTS

LINE BREAK REPAIRING LAYER FOR EXTREME ULTRAVIOLET PATTERNING STACKS

TONE REVERSAL DURING EUV PATTERN TRANSFER USING SURFACE ACTIVE LAYE...

POST-LITHOGRAPHY DEFECT INSPECTION USING AN E-BEAM INSPECTION TOOL

POST-LITHOGRAPHY DEFECT INSPECTION USING AN E-BEAM INSPECTION TOOL

PHOTORESIST PATTERNING ON SILICON NITRIDE

DETERMINATION OF LITHOGRAPHY EFFECTIVE DOSE UNIFORMITY

DETERMINATION OF LITHOGRAPHY EFFECTIVE DOSE UNIFORMITY