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Luciana Meli
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Albany, NY, US
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Patents Grants
last 30 patents
Information
Patent Grant
Alternating copolymer chain scission photoresists
Patent number
11,906,901
Issue date
Feb 20, 2024
International Business Machines Corporation
Dario Goldfarb
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Using E0 exposures for track/cluster monitoring
Patent number
11,561,481
Issue date
Jan 24, 2023
International Business Machines Corporation
Cody J. Murray
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Lithography process delay characterization and effective dose compe...
Patent number
11,194,254
Issue date
Dec 7, 2021
International Business Machines Corporation
Christopher Robinson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Sequential infiltration synthesis extreme ultraviolet single expose...
Patent number
10,998,192
Issue date
May 4, 2021
International Business Machines Corporation
Ekmini Anuja De Silva
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vertical field-effect-transistors having a silicon oxide layer with...
Patent number
10,707,326
Issue date
Jul 7, 2020
International Business Machines Corporation
Chi-Chun Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Care area generation by detection optimized methodology
Patent number
10,437,951
Issue date
Oct 8, 2019
International Business Machines Corporation
Ravi K. Bonam
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Vertical field-effect-transistors having a silicon oxide layer with...
Patent number
10,256,320
Issue date
Apr 9, 2019
International Business Machines Corporation
Chi-Chun Liu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF MAKING EUV MASK WITH AN ABSORBER LAYER
Publication number
20230280644
Publication date
Sep 7, 2023
International Business Machines Corporation
Dario Goldfarb
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ALTERNATING COPOLYMER CHAIN SCISSION PHOTORESISTS
Publication number
20220390845
Publication date
Dec 8, 2022
International Business Machines Corporation
Dario Goldfarb
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Using E0 Exposures for Track/Cluster Monitoring
Publication number
20220019139
Publication date
Jan 20, 2022
International Business Machines Corporation
Cody J. Murray
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Lithography Process Delay Characterization and Effective Dose Compe...
Publication number
20210132502
Publication date
May 6, 2021
International Business Machines Corporation
Christopher Robinson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SEQUENTIAL INFILTRATION SYNTHESIS EXTREME ULTRAVIOLET SINGLE EXPOSE...
Publication number
20210082697
Publication date
Mar 18, 2021
International Business Machines Corporation
Ekmini Anuja De Silva
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VERTICAL FIELD-EFFECT-TRANSISTORS HAVING A SILICON OXIDE LAYER WITH...
Publication number
20190189775
Publication date
Jun 20, 2019
International Business Machines Corporation
Chi-Chun LIU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VERTICAL FIELD-EFFECT-TRANSISTORS HAVING A SILICON OXIDE LAYER WITH...
Publication number
20190109212
Publication date
Apr 11, 2019
International Business Machines Corporation
Chi-Chun LIU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Care Area Generation By Detection Optimized Methodology
Publication number
20190065634
Publication date
Feb 28, 2019
International Business Machines Corporation
Ravi K. Bonam
G06 - COMPUTING CALCULATING COUNTING