Lucy Zhiping Chen

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma deposition of carbon hardmask
- Patent number 11,043,375
- Issue date Jun 22, 2021
- Applied Materials, Inc.
- Yang Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for electron beam etching process
- Patent number 10,790,153
- Issue date Sep 29, 2020
- Applied Materials, Inc.
- Yue Guo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching methods
- Patent number 10,707,086
- Issue date Jul 7, 2020
- Applied Materials, Inc.
- Yang Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition or treatment of diamond-like carbon in a plasma reactor
- Patent number 10,544,505
- Issue date Jan 28, 2020
- Applied Materials, Inc.
- Yang Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Diamond like carbon layer formed by an electron beam plasma process
- Patent number 10,249,495
- Issue date Apr 2, 2019
- Applied Materials, Inc.
- Yang Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mask etch for patterning
- Patent number 9,852,923
- Issue date Dec 26, 2017
- Applied Materials, Inc.
- Gene Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ETCHING APPARATUS
- Publication number 20230162996
- Publication date May 25, 2023
- Applied Materials, Inc.
- Yang YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR ELECTRON BEAM ETCHING PROCESS
- Publication number 20200006036
- Publication date Jan 2, 2020
- Applied Materials, Inc.
- Yue GUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING APPARATUS
- Publication number 20190393053
- Publication date Dec 26, 2019
- Applied Materials, Inc.
- Yang YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIAMOND LIKE CARBON LAYER FORMED BY AN ELECTRON BEAM PLASMA PROCESS
- Publication number 20190228970
- Publication date Jul 25, 2019
- Applied Materials, Inc.
- Yang YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING APPARATUS AND METHODS
- Publication number 20190221437
- Publication date Jul 18, 2019
- Applied Materials, Inc.
- Yang YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA DEPOSITION OF CARBON HARDMASK
- Publication number 20190057862
- Publication date Feb 21, 2019
- Applied Materials, Inc.
- Yang YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OR TREATMENT OF DIAMOND-LIKE CARBON IN A PLASMA REACTOR
- Publication number 20180274089
- Publication date Sep 27, 2018
- Applied Materials, Inc.
- Yang Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ALTERNATING BETWEEN DEPOSITION AND TREATMENT OF DIAMOND-LIKE CARBON
- Publication number 20180274100
- Publication date Sep 27, 2018
- Applied Materials, Inc.
- Yang Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA REACTOR WITH ELECTRON BEAM OF SECONDARY ELECTRONS
- Publication number 20180277340
- Publication date Sep 27, 2018
- Yang Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MASK ETCH FOR PATTERNING
- Publication number 20180076049
- Publication date Mar 15, 2018
- Applied Materials, Inc.
- Gene Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIAMOND LIKE CARBON LAYER FORMED BY AN ELECTRON BEAM PLASMA PROCESS
- Publication number 20170372899
- Publication date Dec 28, 2017
- Applied Materials, Inc.
- Yang YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MASK ETCH FOR PATTERNING
- Publication number 20160293441
- Publication date Oct 6, 2016
- Applied Materials Inc.
- Gene Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for cleaning a substrate processing chamber
- Publication number 20040200498
- Publication date Oct 14, 2004
- APPLIED MATERIALS, INC.
- Xikun Wang
- B08 - CLEANING

Lucy Zhiping Chen

Person

Patents Grantslast 30 patents

Plasma deposition of carbon hardmask

Methods and apparatus for electron beam etching process

Etching methods

Deposition or treatment of diamond-like carbon in a plasma reactor

Diamond like carbon layer formed by an electron beam plasma process

Mask etch for patterning

Patents Applicationslast 30 patents

ETCHING APPARATUS

METHODS AND APPARATUS FOR ELECTRON BEAM ETCHING PROCESS

ETCHING APPARATUS

DIAMOND LIKE CARBON LAYER FORMED BY AN ELECTRON BEAM PLASMA PROCESS

ETCHING APPARATUS AND METHODS

PLASMA DEPOSITION OF CARBON HARDMASK

DEPOSITION OR TREATMENT OF DIAMOND-LIKE CARBON IN A PLASMA REACTOR

ALTERNATING BETWEEN DEPOSITION AND TREATMENT OF DIAMOND-LIKE CARBON

PLASMA REACTOR WITH ELECTRON BEAM OF SECONDARY ELECTRONS

MASK ETCH FOR PATTERNING

DIAMOND LIKE CARBON LAYER FORMED BY AN ELECTRON BEAM PLASMA PROCESS

MASK ETCH FOR PATTERNING

Method and apparatus for cleaning a substrate processing chamber